Takashi Iizumi

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope
- Patent number 8,666,165
- Issue date Mar 4, 2014
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 7,910,886
- Issue date Mar 22, 2011
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System and method for on-line diagnostics
- Patent number 7,849,304
- Issue date Dec 7, 2010
- Hitachi High-Technologies Corporation
- Juntaro Arima
- G05 - CONTROLLING REGULATING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,805,023
- Issue date Sep 28, 2010
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,800,059
- Issue date Sep 21, 2010
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Industrial device receiving remote maintenance operation and output...
- Patent number 7,551,976
- Issue date Jun 23, 2009
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 7,439,505
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring line and space pattern using scanning electron...
- Patent number 7,433,542
- Issue date Oct 7, 2008
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle system and a method for measuring image magnification
- Patent number 7,372,047
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for on-line diagnostics
- Patent number 7,373,501
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Juntaro Arima
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for circuit pattern inspection
- Patent number 7,369,703
- Issue date May 6, 2008
- Hitachi, Ltd.
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,361,894
- Issue date Apr 22, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,340,111
- Issue date Mar 4, 2008
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 7,285,777
- Issue date Oct 23, 2007
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,236,651
- Issue date Jun 26, 2007
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote maintenance method for generating maintenance charge informa...
- Patent number 7,177,715
- Issue date Feb 13, 2007
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,164,126
- Issue date Jan 16, 2007
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for circuit pattern inspection
- Patent number 7,095,884
- Issue date Aug 22, 2006
- Hitachi, Ltd.
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Remote maintenance method, industrial device, and semiconductor device
- Patent number 7,047,096
- Issue date May 16, 2006
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,034,296
- Issue date Apr 25, 2006
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 7,002,151
- Issue date Feb 21, 2006
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Remote maintenance method for industrial device that generates main...
- Patent number 6,954,677
- Issue date Oct 11, 2005
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for monitoring a semiconductor device manufacturi...
- Patent number 6,909,930
- Issue date Jun 21, 2005
- Hitachi, Ltd.
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote maintenance method, industrial device, and semiconductor device
- Patent number 6,862,485
- Issue date Mar 1, 2005
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 6,803,573
- Issue date Oct 12, 2004
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Remote maintenance method, industrial device, and semiconductor device
- Patent number 6,792,325
- Issue date Sep 14, 2004
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Remote maintenance method, industrial device, and semiconductor device
- Patent number 6,708,072
- Issue date Mar 16, 2004
- Hitachi, Ltd.
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 6,627,888
- Issue date Sep 30, 2003
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image correction system for scanning electron microscope
- Patent number 4,907,287
- Issue date Mar 6, 1990
- Hitachi, Ltd.
- Koichi Homma
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090041333
- Publication date Feb 12, 2009
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20080217535
- Publication date Sep 11, 2008
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20080179517
- Publication date Jul 31, 2008
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR ON-LINE DIAGNOSTICS
- Publication number 20080133032
- Publication date Jun 5, 2008
- Juntaro Arima
- G05 - CONTROLLING REGULATING
Information Patent Application
System and method for on-line diagnostics
- Publication number 20080005554
- Publication date Jan 3, 2008
- Juntaro Arima
- G05 - CONTROLLING REGULATING
Information Patent Application
Image evaluation method and microscope
- Publication number 20070280559
- Publication date Dec 6, 2007
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20070112452
- Publication date May 17, 2007
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20070029478
- Publication date Feb 8, 2007
- Mitsugu Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for circuit pattern inspection
- Publication number 20060269121
- Publication date Nov 30, 2006
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20060097158
- Publication date May 11, 2006
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20050247876
- Publication date Nov 10, 2005
- HITACHI HIGH-TECHNOLOGIES CORPORATION
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Application
Method for measuring line and space pattern using scanning electron...
- Publication number 20050207673
- Publication date Sep 22, 2005
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Application
Image evaluation method and microscope
- Publication number 20050199811
- Publication date Sep 15, 2005
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle system and a method for measuring image magnification
- Publication number 20050189501
- Publication date Sep 1, 2005
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20050109937
- Publication date May 26, 2005
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20050038546
- Publication date Feb 17, 2005
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20050038545
- Publication date Feb 17, 2005
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20050033465
- Publication date Feb 10, 2005
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System and method for on-line diagnostics
- Publication number 20030226010
- Publication date Dec 4, 2003
- Juntaro Arima
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20030141451
- Publication date Jul 31, 2003
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20030111602
- Publication date Jun 19, 2003
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Image evaluation method and microscope
- Publication number 20030039386
- Publication date Feb 27, 2003
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for circuit pattern inspection
- Publication number 20030021463
- Publication date Jan 30, 2003
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Method and system for monitoring a semiconductor device manufacturi...
- Publication number 20030015660
- Publication date Jan 23, 2003
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20020183876
- Publication date Dec 5, 2002
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20020183875
- Publication date Dec 5, 2002
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Remote maintenance method, industrial device, and semiconductor device
- Publication number 20020183880
- Publication date Dec 5, 2002
- Juntaro Arima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20010019109
- Publication date Sep 6, 2001
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING

Takashi Iizumi

Person

Patents Grantslast 30 patents

Scanning electron microscope

Sample dimension measuring method and scanning electron microscope

System and method for on-line diagnostics

Image evaluation method and microscope

Method of forming a sample image and charged particle beam apparatus

Industrial device receiving remote maintenance operation and output...

Scanning electron microscope

Method for measuring line and space pattern using scanning electron...

Charged particle system and a method for measuring image magnification

System and method for on-line diagnostics

Method and apparatus for circuit pattern inspection

Method of forming a sample image and charged particle beam apparatus

Image evaluation method and microscope

Sample dimension measuring method and scanning electron microscope

Image evaluation method and microscope

Remote maintenance method for generating maintenance charge informa...

Method of forming a sample image and charged particle beam apparatus

Method and apparatus for circuit pattern inspection

Remote maintenance method, industrial device, and semiconductor device

Method of forming a sample image and charged particle beam apparatus

Scanning electron microscope

Remote maintenance method for industrial device that generates main...

Method and system for monitoring a semiconductor device manufacturi...

Remote maintenance method, industrial device, and semiconductor device

Scanning electron microscope

Remote maintenance method, industrial device, and semiconductor device

Remote maintenance method, industrial device, and semiconductor device

Scanning electron microscope

Image correction system for scanning electron microscope

Patents Applicationslast 30 patents

SCANNING ELECTRON MICROSCOPE

Method of forming a sample image and charged particle beam apparatus

Sample dimension measuring method and scanning electron microscope

SYSTEM AND METHOD FOR ON-LINE DIAGNOSTICS

System and method for on-line diagnostics

Image evaluation method and microscope

Remote maintenance method, industrial device, and semiconductor device

Method of forming a sample image and charged particle beam apparatus

Method and apparatus for circuit pattern inspection

Scanning electron microscope

Sample dimension measuring method and scanning electron microscope

Method for measuring line and space pattern using scanning electron...

Image evaluation method and microscope

Charged particle system and a method for measuring image magnification

Scanning electron microscope

Remote maintenance method, industrial device, and semiconductor device

Remote maintenance method, industrial device, and semiconductor device

Remote maintenance method, industrial device, and semiconductor device

System and method for on-line diagnostics

Method of forming a sample image and charged particle beam apparatus

Method of forming a sample image and charged particle beam apparatus

Image evaluation method and microscope

Method and apparatus for circuit pattern inspection

Method and system for monitoring a semiconductor device manufacturi...

Remote maintenance method, industrial device, and semiconductor device

Remote maintenance method, industrial device, and semiconductor device

Remote maintenance method, industrial device, and semiconductor device

Scanning electron microscope