Takashi Imafu

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and carrier adjusting system
- Patent number 8,060,244
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Takashi Aiuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus and carrier adjusting system
- Publication number 20070293970
- Publication date Dec 20, 2007
- TOKYO ELECTRON LIMITED
- Takashi Aiuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer processing apparatus and transfer device adjustment system
- Publication number 20040186622
- Publication date Sep 23, 2004
- Takashi Aiuchi
- H01 - BASIC ELECTRIC ELEMENTS