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Substrate treatment method
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Patent number 9,362,147
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Issue date Jun 7, 2016
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SCREEN Holdings Co., Ltd.
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Takashi Izuta
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate treatment apparatus
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Patent number 8,361,234
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Issue date Jan 29, 2013
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Dainippon Screen Mfg. Co., Ltd.
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Takashi Izuta
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate treating method
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Patent number 8,153,017
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Issue date Apr 10, 2012
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Dainippon Screen Mfg. Co., Ltd.
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Takashi Izuta
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H01 - BASIC ELECTRIC ELEMENTS