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Takashi KAKEGAWA
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Nirasaki-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Valve device, processing apparatus, and control method
Patent number
11,306,847
Issue date
Apr 19, 2022
Tokyo Electron Limited
Tomohisa Kimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas treatment apparatus and gas treatment method
Patent number
10,156,014
Issue date
Dec 18, 2018
Tokyo Electron Limited
Takashi Kakegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming apparatus and method, gas supply device and storage me...
Patent number
8,133,323
Issue date
Mar 13, 2012
Tokyo Electron Limited
Takashi Kakegawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming apparatus
Patent number
8,128,751
Issue date
Mar 6, 2012
Tokyo Electron Limited
Shigeru Kasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming device
Patent number
7,661,386
Issue date
Feb 16, 2010
Tokyo Electron Limited
Shigeru Kasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS
Publication number
20240191357
Publication date
Jun 13, 2024
TOKYO ELECTRON LIMITED
Yuta SORITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220396875
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Takanobu HOTTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220396876
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Takuya KAWAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VALVE DEVICE, PROCESSING APPARATUS, AND CONTROL METHOD
Publication number
20200056724
Publication date
Feb 20, 2020
TOKYO ELECTRON LIMITED
Tomohisa KIMOTO
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
Publication number
20190078207
Publication date
Mar 14, 2019
TOKYO ELECTRON LIMITED
Hironori Yagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS TREATMENT APPARATUS AND GAS TREATMENT METHOD
Publication number
20180171478
Publication date
Jun 21, 2018
TOKYO ELECTRON LIMITED
Takashi KAKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150322571
Publication date
Nov 12, 2015
TOKYO ELECTRON LIMITED
Hideaki YAMASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE TREATMENT METHOD, SHOWER HEAD, PROCESSING CONTAINER, AND PR...
Publication number
20120115400
Publication date
May 10, 2012
TOKYO ELECTRON LIMITED
Takashi KAKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE TREATMENT METHOD, SHOWER HEAD, PROCESSING CONTAINER, AND PR...
Publication number
20110061432
Publication date
Mar 17, 2011
TOKYO ELECTRON LIMITED
Takashi KAKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS
Publication number
20100107977
Publication date
May 6, 2010
TOKYO ELECTRON LIMITED
Shigeru KASAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING APPARATUS
Publication number
20090178614
Publication date
Jul 16, 2009
TOKYO ELECTRON LIMITED
Shigeru KASAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND METHOD, GAS SUPPLY DEVICE AND STORAGE ME...
Publication number
20090104351
Publication date
Apr 23, 2009
TOKYO ELECTRON LIMITED
Takashi KAKEGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film-forming apparatus
Publication number
20070175396
Publication date
Aug 2, 2007
Shigeru Kasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas Supplying unit and substrate processing apparatus
Publication number
20070131168
Publication date
Jun 14, 2007
Hisashi Gomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film forming device
Publication number
20050000423
Publication date
Jan 6, 2005
Shigeru Kasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...