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Takashi KAKEGAWA

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Patents Grantslast 30 patents

  • Information Patent Grant

    Valve device, processing apparatus, and control method
    • Patent number 11,306,847
    • Issue date Apr 19, 2022
    • Tokyo Electron Limited
    • Tomohisa Kimoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas treatment apparatus and gas treatment method
    • Patent number 10,156,014
    • Issue date Dec 18, 2018
    • Tokyo Electron Limited
    • Takashi Kakegawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming apparatus and method, gas supply device and storage me...
    • Patent number 8,133,323
    • Issue date Mar 13, 2012
    • Tokyo Electron Limited
    • Takashi Kakegawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming apparatus
    • Patent number 8,128,751
    • Issue date Mar 6, 2012
    • Tokyo Electron Limited
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming device
    • Patent number 7,661,386
    • Issue date Feb 16, 2010
    • Tokyo Electron Limited
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SHOWER HEAD ASSEMBLY AND FILM FORMING APPARATUS
    • Publication number 20240191357
    • Publication date Jun 13, 2024
    • TOKYO ELECTRON LIMITED
    • Yuta SORITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396875
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396876
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VALVE DEVICE, PROCESSING APPARATUS, AND CONTROL METHOD
    • Publication number 20200056724
    • Publication date Feb 20, 2020
    • TOKYO ELECTRON LIMITED
    • Tomohisa KIMOTO
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    GAS SUPPLY APPARATUS AND FILM FORMING APPARATUS
    • Publication number 20190078207
    • Publication date Mar 14, 2019
    • TOKYO ELECTRON LIMITED
    • Hironori Yagi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS TREATMENT APPARATUS AND GAS TREATMENT METHOD
    • Publication number 20180171478
    • Publication date Jun 21, 2018
    • TOKYO ELECTRON LIMITED
    • Takashi KAKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150322571
    • Publication date Nov 12, 2015
    • TOKYO ELECTRON LIMITED
    • Hideaki YAMASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT METHOD, SHOWER HEAD, PROCESSING CONTAINER, AND PR...
    • Publication number 20120115400
    • Publication date May 10, 2012
    • TOKYO ELECTRON LIMITED
    • Takashi KAKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT METHOD, SHOWER HEAD, PROCESSING CONTAINER, AND PR...
    • Publication number 20110061432
    • Publication date Mar 17, 2011
    • TOKYO ELECTRON LIMITED
    • Takashi KAKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20100107977
    • Publication date May 6, 2010
    • TOKYO ELECTRON LIMITED
    • Shigeru KASAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20090178614
    • Publication date Jul 16, 2009
    • TOKYO ELECTRON LIMITED
    • Shigeru KASAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND METHOD, GAS SUPPLY DEVICE AND STORAGE ME...
    • Publication number 20090104351
    • Publication date Apr 23, 2009
    • TOKYO ELECTRON LIMITED
    • Takashi KAKEGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film-forming apparatus
    • Publication number 20070175396
    • Publication date Aug 2, 2007
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas Supplying unit and substrate processing apparatus
    • Publication number 20070131168
    • Publication date Jun 14, 2007
    • Hisashi Gomi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film forming device
    • Publication number 20050000423
    • Publication date Jan 6, 2005
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...