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Takashi KAMIO

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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas processing apparatus
    • Patent number 11,578,408
    • Issue date Feb 14, 2023
    • Tokyo Electron Limited
    • Takashi Kamio
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 11,527,404
    • Issue date Dec 13, 2022
    • Tokyo Electron Limited
    • Tetsuya Saitou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas processing apparatus and gas processing method
    • Patent number 11,499,225
    • Issue date Nov 15, 2022
    • Tokyo Electron Limited
    • Hirotaka Kuwada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming apparatus
    • Patent number 11,236,423
    • Issue date Feb 1, 2022
    • Tokyo Electron Limited
    • Takashi Kamio
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing apparatus and cover member
    • Patent number 11,104,991
    • Issue date Aug 31, 2021
    • Tokyo Electron Limited
    • Takashi Kamio
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 10,864,548
    • Issue date Dec 15, 2020
    • Tokyo Electron Limited
    • Hiroaki Ashizawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,612,141
    • Issue date Apr 7, 2020
    • Tokyo Electron Limited
    • Tsuyoshi Takahashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20200294799
    • Publication date Sep 17, 2020
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film-Forming Apparatus and Film-Forming Method
    • Publication number 20200208267
    • Publication date Jul 2, 2020
    • TOKYO ELECTRON LIMITED
    • Takashi KAMIO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD
    • Publication number 20200048765
    • Publication date Feb 13, 2020
    • TOKYO ELECTRON LIMITED
    • Hirotaka KUWADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS PROCESSING APPARATUS
    • Publication number 20190024234
    • Publication date Jan 24, 2019
    • TOKYO ELECTRON LIMITED
    • Takashi KAMIO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20180311700
    • Publication date Nov 1, 2018
    • TOKYO ELECTRON LIMITED
    • Hiroaki Ashizawa
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    Processing Apparatus and Cover Member
    • Publication number 20180112309
    • Publication date Apr 26, 2018
    • TOKYO ELECTRON LIMITED
    • Takashi KAMIO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20160177445
    • Publication date Jun 23, 2016
    • TOKYO ELECTRON LIMITED
    • Tsuyoshi TAKAHASHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...