Takashi Kiuchi

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Tsukuba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Alignment of mask and semiconductor wafer using linear Fresnel zone...
- Patent number 4,999,487
- Issue date Mar 12, 1991
- Fujitsu Limited
- Shigeru Maruyama
- G02 - OPTICS
Information Patent Grant
Alignment of mask and semiconductor wafer using linear fresnel zone...
- Patent number 4,948,983
- Issue date Aug 14, 1990
- Fujitsu Limited
- Shigeru Maruyama
- G02 - OPTICS