TREA

Takashi KUMAGAI

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing system
    • Patent number 11,515,183
    • Issue date Nov 29, 2022
    • Tokyo Electron Limited
    • Suguru Motegi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing system
    • Patent number 11,495,480
    • Issue date Nov 8, 2022
    • Tokyo Electron Limited
    • Suguru Motegi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20230015560
    • Publication date Jan 19, 2023
    • TOKYO ELECTRON LIMITED
    • Suguru MOTEGI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20210057243
    • Publication date Feb 25, 2021
    • TOKYO ELECTRON LIMITED
    • Suguru MOTEGI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20210043480
    • Publication date Feb 11, 2021
    • TOKYO ELECTRON LIMITED
    • Suguru MOTEGI
    • H01 - BASIC ELECTRIC ELEMENTS