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Takashi Kuroda
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Ehime, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Ion implantation method and ion implantation apparatus
Patent number
9,379,030
Issue date
Jun 28, 2016
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Shiro Ninomiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Beam processing system and beam processing method
Patent number
7,411,709
Issue date
Aug 12, 2008
Sen Corporation
Takanori Yagita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer charge compensation device and ion implantation system having...
Patent number
7,304,319
Issue date
Dec 4, 2007
SEN Corporation, an SHI and Axcelis Company
Hiroshi Kawaguchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
Publication number
20140065737
Publication date
Mar 6, 2014
SEN Corporation
Shiro Ninomiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Beam processing system and beam processing method
Publication number
20080002244
Publication date
Jan 3, 2008
SEN CORPORATION
Takanori Yagita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer charge compensation device and ion implantation system having...
Publication number
20060113492
Publication date
Jun 1, 2006
SUMITOMO EATON NOVA CORPORATION
Hiroshi Kawaguchi
H01 - BASIC ELECTRIC ELEMENTS