Takashi KUSAMA

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Excimer laser apparatus and electronic-device manufacturing method
- Patent number 11,079,686
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Keisuke Ishida
- G01 - MEASURING TESTING
Information Patent Grant
Narrow band laser apparatus
- Patent number 9,882,343
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD
- Publication number 20200274315
- Publication date Aug 27, 2020
- Gigaphoton Inc.
- Keisuke ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NARROW BAND LASER APPARATUS
- Publication number 20170222391
- Publication date Aug 3, 2017
- Gigaphoton Inc.
- Masato MORIYA
- G02 - OPTICS