Takashi KUSHIDA

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Fukuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for measuring surface properties of polishing pad
- Patent number 10,401,285
- Issue date Sep 3, 2019
- Ebara Corporation
- Hisanori Matsuo
- B24 - GRINDING POLISHING
Information Patent Grant
Method of measuring surface properties of polishing pad
- Patent number 8,932,883
- Issue date Jan 13, 2015
- Ebara Corporation
- Hisanori Matsuo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MEASURING SURFACE PROPERTIES OF POLISHING PAD
- Publication number 20140273308
- Publication date Sep 18, 2014
- EBARA CORPORATION
- Hisanori MATSUO
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD
- Publication number 20140262027
- Publication date Sep 18, 2014
- KYUSHU INSTITUTE OF TECHNOLOGY
- Hisanori MATSUO
- G01 - MEASURING TESTING