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Takashi Magara
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Yamanashi, JP
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last 30 patents
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Patent Grant
Method of cleaning substrate-processing device and substrate-proces...
Patent number
7,383,841
Issue date
Jun 10, 2008
Tokyo Electron Limited
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Metal oxide film formation method and apparatus
Patent number
6,756,235
Issue date
Jun 29, 2004
Tokyo Electron Limited
Yijun Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thin film forming method
Patent number
6,485,564
Issue date
Nov 26, 2002
Tokyo Electron Limited
Yijun Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of cleaning substrate-processing device and substrate-proces...
Publication number
20060175011
Publication date
Aug 10, 2006
Hiroshi Shinriki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...