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Takashi Maruyama
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Kawasaki-shi, JP
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last 30 patents
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Patent Grant
Chamber apparatus and heating method
Patent number
9,236,283
Issue date
Jan 12, 2016
Tokyo Ohka Kogyo Co., Ltd.
Tsutomu Sahoda
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
CHAMBER APPARATUS AND HEATING METHOD
Publication number
20140263273
Publication date
Sep 18, 2014
Tokyo Ohka Kogyo Co., Ltd.
Tsutomu Sahoda
H01 - BASIC ELECTRIC ELEMENTS