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Takashi Matsumura
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Yokohama, JP
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last 30 patents
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Patent Grant
Device for positioning a semi-conductor wafer
Patent number
4,887,904
Issue date
Dec 19, 1989
Canon Kabushiki Kaisha
Hiroshi Nakazato
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for positioning a semi-conductor wafer
Patent number
4,853,880
Issue date
Aug 1, 1989
Canon Kabushiki Kaisha
Takahiro Akamatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment system allowing alignment when alignment marks are absent
Patent number
4,712,016
Issue date
Dec 8, 1987
Canon Kabushiki Kaisha
Takashi Matsumura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position detecting device utilizing selective outputs of the photod...
Patent number
4,663,534
Issue date
May 5, 1987
Canon Kabushiki Kaisha
Naoki Ayata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY