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Takashi Matsuzaka
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Iruma, JP
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last 30 patents
Information
Patent Grant
Electron beam lithography apparatus and pattern forming method
Patent number
6,511,048
Issue date
Jan 28, 2003
Hitachi, Ltd.
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor devices utilizing plurality...
Patent number
6,225,011
Issue date
May 1, 2001
Hitachi, Ltd.
Yasuko Gotoh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electron beam lithography system
Patent number
5,326,979
Issue date
Jul 5, 1994
Hitachi, Ltd.
Katsuhiro Kawasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mark position detection system for use in charged particle beam app...
Patent number
4,808,829
Issue date
Feb 28, 1989
Hitachi Ltd.
Masahide Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam exposure apparatus
Patent number
4,701,620
Issue date
Oct 20, 1987
Hitachi, Ltd.
Masahide Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for electron beam lithography
Patent number
4,577,111
Issue date
Mar 18, 1986
Hitachi, Ltd.
Norio Saitou
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of displaying an image of phase contrast in a scanning trans...
Patent number
4,382,182
Issue date
May 3, 1983
Hitachi, Ltd.
Takashi Matsuzaka
H01 - BASIC ELECTRIC ELEMENTS