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Takashi Meguro
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Scanning exposure apparatus and device manufacturing method
Patent number
8,400,611
Issue date
Mar 19, 2013
Canon Kabushiki Kaisha
Tomohiro Harayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, and device manufacturing method
Patent number
7,463,335
Issue date
Dec 9, 2008
Canon Kabuhsiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, and device manufacturing method
Patent number
7,253,877
Issue date
Aug 7, 2007
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage apparatus, exposure apparatus, and semiconductor device manuf...
Patent number
6,965,428
Issue date
Nov 15, 2005
Canon Kabushiki Kaisha
Yasuyo Muto
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100123891
Publication date
May 20, 2010
Canon Kabushiki Kaisha
Tomohiro Harayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20070285648
Publication date
Dec 13, 2007
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, and device manufacturing method
Publication number
20060114433
Publication date
Jun 1, 2006
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
Publication number
20060017909
Publication date
Jan 26, 2006
Canon Kabushiki Kaisha
Yasuyo Muto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
Publication number
20040124594
Publication date
Jul 1, 2004
Canon Kabushiki Kaisha
Yasuyo Muto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY