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Film forming apparatus
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Patent number 6,506,292
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Issue date Jan 14, 2003
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Nissin Electric Co., Ltd.
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Hiroshi Murakami
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H01 - BASIC ELECTRIC ELEMENTS
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Thin film forming apparatus
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Patent number 6,116,187
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Issue date Sep 12, 2000
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Nissin Electric Co., Ltd.
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Hiroshi Murakami
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Thin film forming apparatus
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Patent number 6,051,120
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Issue date Apr 18, 2000
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Nissin Electric Co., Ltd.
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Shigeaki Kishida
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H01 - BASIC ELECTRIC ELEMENTS