Takashi Mitsuya

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,911,868
- Issue date Feb 27, 2024
- Ebara Corporation
- Takashi Mitsuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, controller of substrate treatment ap...
- Patent number 11,177,147
- Issue date Nov 16, 2021
- Ebara Corporation
- Takashi Mitsuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scheduler, substrate processing apparatus, and substrate conveyance...
- Patent number 11,099,546
- Issue date Aug 24, 2021
- Ebara Corporation
- Koji Nonobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating system, a plating system control method, and a storage medi...
- Patent number 11,098,414
- Issue date Aug 24, 2021
- Ebara Corporation
- Takashi Mitsuya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Scheduler, substrate processing apparatus, and substrate conveyance...
- Patent number 10,824,135
- Issue date Nov 3, 2020
- Ebara Corporation
- Koji Nonobe
- G05 - CONTROLLING REGULATING
Information Patent Grant
Scheduler, substrate processing apparatus, and substrate conveyance...
- Patent number 10,824,138
- Issue date Nov 3, 2020
- Ebara Corporation
- Koji Nonobe
- G05 - CONTROLLING REGULATING
Information Patent Grant
Plating system, a plating system control method, and a storage medi...
- Patent number 10,501,862
- Issue date Dec 10, 2019
- Ebara Corporation
- Takashi Mitsuya
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus and substrate transfer method
- Patent number 10,141,211
- Issue date Nov 27, 2018
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of transferring a substrate
- Patent number 9,786,532
- Issue date Oct 10, 2017
- Ebara Corporation
- Toshio Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating substrate processing apparatus and substrate pr...
- Patent number 8,550,875
- Issue date Oct 8, 2013
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,398,811
- Issue date Mar 19, 2013
- Ebara Corporation
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Method of operating substrate processing apparatus and substrate pr...
- Patent number 8,202,139
- Issue date Jun 19, 2012
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and substrate processing method
- Patent number 8,128,458
- Issue date Mar 6, 2012
- Ebara Corporation
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,025,759
- Issue date Sep 27, 2011
- Ebara Corporation
- Tatsuya Sasaki
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210402548
- Publication date Dec 30, 2021
- EBARA CORPORATION
- Takashi Mitsuya
- B24 - GRINDING POLISHING
Information Patent Application
SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...
- Publication number 20210011462
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Koji Nonobe
- G05 - CONTROLLING REGULATING
Information Patent Application
PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...
- Publication number 20200056301
- Publication date Feb 20, 2020
- EBARA CORPORATION
- Takashi MITSUYA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...
- Publication number 20190271970
- Publication date Sep 5, 2019
- EBARA CORPORATION
- Koji NONOBE
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, CONTROLLER OF SUBSTRATE TREATMENT AP...
- Publication number 20190237350
- Publication date Aug 1, 2019
- EBARA CORPORATION
- Takashi MITSUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...
- Publication number 20180203434
- Publication date Jul 19, 2018
- EBARA CORPORATION
- Koji NONOBE
- G05 - CONTROLLING REGULATING
Information Patent Application
PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...
- Publication number 20180038008
- Publication date Feb 8, 2018
- EBARA CORPORATION
- Takashi MITSUYA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20170358472
- Publication date Dec 14, 2017
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT
- Publication number 20150270147
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD
- Publication number 20150270151
- Publication date Sep 24, 2015
- EBARA CORPORATION
- Toshio YOKOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PR...
- Publication number 20120231703
- Publication date Sep 13, 2012
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20110306274
- Publication date Dec 15, 2011
- Tatsuya Sasaki
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and substrate processing method
- Publication number 20090209175
- Publication date Aug 20, 2009
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Application
Method of operating substrate processing apparatus and substrate pr...
- Publication number 20090186557
- Publication date Jul 23, 2009
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and polishing method
- Publication number 20060166503
- Publication date Jul 27, 2006
- Tatsuya Sasaki
- B24 - GRINDING POLISHING

Takashi Mitsuya

Person

Patents Grantslast 30 patents

Substrate transporter and substrate processing apparatus including...

Substrate processing apparatus, substrate processing method, and st...

Substrate treatment apparatus, controller of substrate treatment ap...

Scheduler, substrate processing apparatus, and substrate conveyance...

Plating system, a plating system control method, and a storage medi...

Scheduler, substrate processing apparatus, and substrate conveyance...

Scheduler, substrate processing apparatus, and substrate conveyance...

Plating system, a plating system control method, and a storage medi...

Substrate processing apparatus and substrate transfer method

Substrate processing apparatus and method of transferring a substrate

Method of operating substrate processing apparatus and substrate pr...

Polishing apparatus and polishing method

Method of operating substrate processing apparatus and substrate pr...

Polishing apparatus and substrate processing method

Polishing apparatus and polishing method

Patents Applicationslast 30 patents

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...

PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...

SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...

SUBSTRATE TREATMENT APPARATUS, CONTROLLER OF SUBSTRATE TREATMENT AP...

SCHEDULER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE...

PLATING SYSTEM, A PLATING SYSTEM CONTROL METHOD, AND A STORAGE MEDI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

SUBSTRATE PROCESSING APPARATUS AND RESIST REMOVING UNIT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANFSER METHOD

METHOD OF OPERATING SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PR...

POLISHING APPARATUS AND POLISHING METHOD

Polishing apparatus and substrate processing method

Method of operating substrate processing apparatus and substrate pr...

Polishing apparatus and polishing method