Takashi Miyamatsu

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TOKYO, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid for immersion exposure and immersion exposure method
- Patent number 7,580,111
- Issue date Aug 25, 2009
- JSR Corporation
- Takashi Miyamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sulfonium salt compound, photoacid generator, and positive-tone rad...
- Patent number 7,371,503
- Issue date May 13, 2008
- JSR Corporation
- Takashi Miyamatsu
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
Liquid for immersion exposure and immersion exposure method
- Publication number 20070164261
- Publication date Jul 19, 2007
- Takashi Miyamatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Sulfonium salts, radiation- sensitive acid generators, and positive...
- Publication number 20060141383
- Publication date Jun 29, 2006
- Takashi Miyamatsu
- C07 - ORGANIC CHEMISTRY