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Takashi Morii
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Wakayama, JP
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last 30 patents
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Patent Grant
Method for PECVD overlay improvement
Patent number
10,236,225
Issue date
Mar 19, 2019
Applied Materials, Inc.
Yoichi Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for PECVD overlay improvement
Patent number
9,947,599
Issue date
Apr 17, 2018
Applied Materials, Inc.
Yoichi Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing conformal amorphous carbon film by plasma-enh...
Patent number
8,105,465
Issue date
Jan 31, 2012
Applied Materials, Inc.
Kwangduk Douglas Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR PECVD OVERLAY IMPROVEMENT
Publication number
20180226306
Publication date
Aug 9, 2018
Applied Materials, Inc.
Yoichi SUZUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PECVD OVERLAY IMPROVEMENT
Publication number
20170309525
Publication date
Oct 26, 2017
Applied Materials, Inc.
Yoichi SUZUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enh...
Publication number
20100093187
Publication date
Apr 15, 2010
Applied Materials, Inc.
Kwangduk Douglas Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...