Takashi Nagai

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,033,872
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Keita Hirase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,410,861
- Issue date Aug 9, 2022
- Tokyo Electron Limited
- Takashi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,158,525
- Issue date Oct 26, 2021
- Tokyo Electron Limited
- Yasuhiro Takaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,062,922
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Takashi Nagai
- G08 - SIGNALLING
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,985,035
- Issue date Apr 20, 2021
- Tokyo Electron Limited
- Hiromi Hara
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,607,849
- Issue date Mar 31, 2020
- Tokyo Electron Limited
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 10,032,642
- Issue date Jul 24, 2018
- Tokyo Electron Limited
- Hideaki Sato
- B24 - GRINDING POLISHING
Information Patent Grant
Liquid processing apparatus, liquid processing method and storage m...
- Patent number 9,711,380
- Issue date Jul 18, 2017
- Tokyo Electron Limited
- Norihiro Ito
- B08 - CLEANING
Information Patent Grant
Liquid process apparatus and liquid process method
- Patent number 9,691,602
- Issue date Jun 27, 2017
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and liquid treatment method
- Patent number 9,640,383
- Issue date May 2, 2017
- Tokyo Electron Limited
- Kazuhiro Aiura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid process apparatus and liquid process method
- Patent number 9,177,838
- Issue date Nov 3, 2015
- Tokyo Electron Limited
- Norihiro Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,865,483
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Kazuhiro Aiura
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210366740
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Keita HIRASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE DEVICE AND STORAGE METHOD
- Publication number 20210368586
- Publication date Nov 25, 2021
- TOKYO ELECTRON LIMITED
- Koji OGURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20190080938
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takahiro Kawazu
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190067048
- Publication date Feb 28, 2019
- Tokyo Electron Limited
- Yasuhiro Takaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20180301345
- Publication date Oct 18, 2018
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180247841
- Publication date Aug 30, 2018
- TOKYO ELECTRON LIMITED
- Takashi Nagai
- G08 - SIGNALLING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20180233384
- Publication date Aug 16, 2018
- TOKYO ELECTRON LIMITED
- Takashi Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20160336202
- Publication date Nov 17, 2016
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- G02 - OPTICS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20150221530
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Hiromi Hara
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140045281
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Kazuhiro AIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD
- Publication number 20130319476
- Publication date Dec 5, 2013
- Kazuhiro Aiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...
- Publication number 20130048609
- Publication date Feb 28, 2013
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD
- Publication number 20130014784
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Norihiro ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD
- Publication number 20130014786
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS

Takashi Nagai

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate liquid processing apparatus

Substrate liquid processing apparatus

Substrate processing apparatus and substrate processing method

Substrate liquid processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate liquid processing apparatus

Liquid processing apparatus, liquid processing method and storage m...

Liquid process apparatus and liquid process method

Liquid treatment apparatus and liquid treatment method

Liquid process apparatus and liquid process method

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

STORAGE DEVICE AND STORAGE METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID TREATMENT APPARATUS AND LIQUID TREATMENT METHOD

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE M...

LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD

LIQUID PROCESS APPARATUS AND LIQUID PROCESS METHOD