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Takashi NAGANO
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Osaka, JP
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last 30 patents
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Patent Grant
Substrate damage detection device, substrate transfer robot with su...
Patent number
9,390,953
Issue date
Jul 12, 2016
Daihen Corporation
Masaru Shimada
G01 - MEASURING TESTING
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last 30 patents
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SUBSTRATE DAMAGE DETECTION DEVICE, SUBSTRATE TRANSFER ROBOT WITH SU...
Publication number
20150253258
Publication date
Sep 10, 2015
DAIHEN Corporation
Masaru SHIMADA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS