Takashi Nakazawa

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,955,352
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Hiroki Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,905,603
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Takashi Nakazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,862,474
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Taisei Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,551,935
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Takashi Nakazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,685,858
- Issue date Jun 16, 2020
- Tokyo Electron Limited
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240084458
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Takashi NAKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220195609
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Takashi NAKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210210363
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Hiroki SAKURAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210175093
- Publication date Jun 10, 2021
- TOKYO ELECTRON LIMITED
- Taisei Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200321217
- Publication date Oct 8, 2020
- TOKYO ELECTRON LIMITED
- Takashi Nakazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190006206
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Hiroyuki Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF PROCESSING CH...
- Publication number 20170084470
- Publication date Mar 23, 2017
- TOKYO ELECTRON LIMITED
- Hiroyuki Suzuki
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20140373877
- Publication date Dec 25, 2014
- Shigehisa Inoue
- B08 - CLEANING

Takashi Nakazawa

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND CLEANING METHOD OF PROCESSING CH...

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD