Takashi Nishi

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Ehime, JP

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Patents Grantslast 30 patents

Information Patent Grant
Irradiation system with ion beam/charged particle beam
- Patent number 7,315,034
- Issue date Jan 1, 2008
- SEN Corporation, an SHI and Axcelis Company
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam space-charge compensation device and ion implantation system h...
- Patent number 7,276,711
- Issue date Oct 2, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Beam space-charge compensation device and ion implantation system h...
- Publication number 20060113491
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Irradiation system with ion beam/charged particle beam
- Publication number 20060113467
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS