Takashi Nishimori

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Shower head structure and cleaning method thereof
- Patent number 6,905,079
- Issue date Jun 14, 2005
- Tokyo Electron Limited
- Tomonao Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20150184294
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NI FILM FORMING METHOD
- Publication number 20120183689
- Publication date Jul 19, 2012
- TOKYO ELECTRON LIMITED
- Mikio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL SILICIDE FILM FORMING METHOD
- Publication number 20120171863
- Publication date Jul 5, 2012
- TOKYO ELECTRON LIMITED
- Mikio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...
- Publication number 20110159188
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING METALLIC FILM AND PROGRAM-STORING RECORDING MEDIUM
- Publication number 20090246373
- Publication date Oct 1, 2009
- Tokyo Electron Limited
- Mitsuhiro Tachibana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower head structure and cleaning method thereof
- Publication number 20050082385
- Publication date Apr 21, 2005
- Tomonao Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower head structure and cleaning method thereof
- Publication number 20020029748
- Publication date Mar 14, 2002
- Tomonao Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takashi Nishimori

Person

Patents Grantslast 30 patents

Shower head structure and cleaning method thereof

Patents Applicationslast 30 patents

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

NI FILM FORMING METHOD

METAL SILICIDE FILM FORMING METHOD

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-REA...

METHOD OF FORMING METALLIC FILM AND PROGRAM-STORING RECORDING MEDIUM

Shower head structure and cleaning method thereof

Shower head structure and cleaning method thereof