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Substrate processing apparatus
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Patent number 11,512,392
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Issue date Nov 29, 2022
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Kokusai Electric Corporation
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Takayuki Nakada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 10,837,112
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Issue date Nov 17, 2020
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Kokusai Electric Corporation
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Yasuaki Komae
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 10,508,336
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Issue date Dec 17, 2019
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Kokusai Electric Corporation
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Takayuki Nakada
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 9,966,286
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Issue date May 8, 2018
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Hitachi Kokusai Electric Inc.
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Takashi Nogami
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 9,698,037
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Issue date Jul 4, 2017
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Hitachi Kokusai Electric Inc.
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Seiyo Nakashima
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor manufacturing equipment
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Patent number D652395
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Issue date Jan 17, 2012
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Hitachi Kokusai Electric Inc.
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Masakazu Shimada
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D13 - Equipment for production, distribution, or transformation of energy
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Semiconductor manufacturing equipment
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Patent number D651990
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Issue date Jan 10, 2012
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Hitachi Kokusai Electric Inc.
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Masakazu Shimada
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D13 - Equipment for production, distribution, or transformation of energy