Takashi O

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Kanagawa-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming ring and method of manufacturing semiconductor device
- Patent number 7,247,888
- Issue date Jul 24, 2007
- Kabushiki Kaisha Toshiba
- Hirotaka Ogihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 6,368,977
- Issue date Apr 9, 2002
- Kabushiki Kaisha Toshiba
- Masaki Narita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method using electrostatic chuck...
- Patent number 6,333,246
- Issue date Dec 25, 2001
- Kabushiki Kaisha Toshiba
- Masaki Narita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Film forming ring and method of manufacturing semiconductor device
- Publication number 20050191811
- Publication date Sep 1, 2005
- Hirotaka Ogihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...