Takashi OKUBO

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Nagano-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer polishing apparatus
- Patent number 9,017,146
- Issue date Apr 28, 2015
- Fujikoshi Machinery Corp.
- Yoshio Nakamura
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
WAFER POLISHING APPARATUS
- Publication number 20140154958
- Publication date Jun 5, 2014
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Yoshio NAKAMURA
- B24 - GRINDING POLISHING