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Takashi Onoda
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Yonezawa, JP
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last 30 patents
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Patent Grant
Wafer carrying device and wafer carrying method
Patent number
5,921,744
Issue date
Jul 13, 1999
Kabushiki-Kaisha Watanabe Shoko
Masayuki Toda
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Patent Grant
Wafer carrying device and wafer carrying method
Patent number
5,518,360
Issue date
May 21, 1996
Kabushiki-Kaisha Watanabe Shoko
Masayuki Toda
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL