Takashi Saito

Person

Oyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light generation apparatus and extreme ultravio...
- Patent number 11,211,239
- Issue date Dec 28, 2021
- Gigaphoton Inc.
- Atsushi Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation device and electronic device m...
- Patent number 11,042,102
- Issue date Jun 22, 2021
- Gigaphoton Inc.
- Shinji Nagai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,455,679
- Issue date Oct 22, 2019
- Gigaphoton Inc.
- Takashi Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generating device
- Patent number 10,268,119
- Issue date Apr 23, 2019
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber device, target generation method, and extreme ultraviolet l...
- Patent number 10,028,365
- Issue date Jul 17, 2018
- Gigaphoton Inc.
- Takanobu Ishihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme UV light generation apparatus and method
- Patent number 9,949,354
- Issue date Apr 17, 2018
- Gigaphoton Inc.
- Takashi Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,942,973
- Issue date Apr 10, 2018
- Gigaphoton Inc.
- Tamotsu Abe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Target producing apparatus
- Patent number 9,883,574
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Fumio Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Slab amplifier, and laser apparatus and extreme ultraviolet light g...
- Patent number 9,680,277
- Issue date Jun 13, 2017
- Gigaphoton Inc.
- Krzysztof Nowak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus with a gas supply to...
- Patent number 9,661,730
- Issue date May 23, 2017
- Gigaphoton, Inc.
- Atsushi Ueda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber for extreme ultraviolet light generation apparatus, and ext...
- Patent number 9,538,629
- Issue date Jan 3, 2017
- Gigaphoton Inc.
- Takashi Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generating system
- Patent number 9,439,276
- Issue date Sep 6, 2016
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas laser apparatus emitting ultraviolet radiation
- Patent number 6,847,670
- Issue date Jan 25, 2005
- Ushio Denki Kabushiki Kaisya
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulse oscillating gas laser device
- Patent number 6,639,929
- Issue date Oct 28, 2003
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply circuit diagram design system
- Patent number 6,170,079
- Issue date Jan 2, 2001
- Fujitsu Limited
- Tsuyoshi Kato
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND ELECTRONIC DEVICE M...
- Publication number 20200301285
- Publication date Sep 24, 2020
- Gigaphoton Inc.
- Shinji NAGAI
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
- Publication number 20200185212
- Publication date Jun 11, 2020
- Gigaphoton Inc.
- Atsushi UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20180224748
- Publication date Aug 9, 2018
- Gigaphoton Inc.
- Shinji NAGAI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20180103534
- Publication date Apr 12, 2018
- Gigaphoton Inc.
- Takashi SAITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET L...
- Publication number 20180007770
- Publication date Jan 4, 2018
- Gigaphoton Inc.
- Takanobu ISHIHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20170215267
- Publication date Jul 27, 2017
- Gigaphoton Inc.
- Tamotsu ABE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TARGET PRODUCING APPARATUS
- Publication number 20160270199
- Publication date Sep 15, 2016
- Gigaphoton Inc.
- Fumio IWAMOTO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160255707
- Publication date Sep 1, 2016
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METH...
- Publication number 20160087389
- Publication date Mar 24, 2016
- Gigaphoton Inc.
- Motoki NIWANO
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
- Publication number 20160066401
- Publication date Mar 3, 2016
- Gigaphoton Inc.
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME UV LIGHT GENERATION APPARATUS
- Publication number 20160037616
- Publication date Feb 4, 2016
- GIGAPHOTON INC.
- Takashi SAITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...
- Publication number 20150296604
- Publication date Oct 15, 2015
- Gigaphoton Inc.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT G...
- Publication number 20150188277
- Publication date Jul 2, 2015
- GIGAPHOTON INC.
- Krzysztof NOWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER FOR EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND EXT...
- Publication number 20140253716
- Publication date Sep 11, 2014
- GIGAPHOTON INC.
- Takashi SAITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140098830
- Publication date Apr 10, 2014
- GIGAPHOTON INC.
- Takayuki YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Excimer laser apparatus
- Publication number 20040009620
- Publication date Jan 15, 2004
- Takashi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pulse oscillating gas laser device
- Publication number 20030031225
- Publication date Feb 13, 2003
- GIGAPHOTON INC.
- Hakaru Mizoguchi
- H01 - BASIC ELECTRIC ELEMENTS

Takashi Saito

Person

Patents Grantslast 30 patents

Extreme ultraviolet light generation apparatus and extreme ultravio...

Extreme ultraviolet light generation device and electronic device m...

Extreme ultraviolet light generation device

Extreme ultraviolet light generating device

Chamber device, target generation method, and extreme ultraviolet l...

Extreme UV light generation apparatus and method

Extreme ultraviolet light generation apparatus

Target producing apparatus

Slab amplifier, and laser apparatus and extreme ultraviolet light g...

Extreme ultraviolet light generation apparatus with a gas supply to...

Chamber for extreme ultraviolet light generation apparatus, and ext...

Extreme ultraviolet light generating system

Gas laser apparatus emitting ultraviolet radiation

Pulse oscillating gas laser device

Power supply circuit diagram design system

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND ELECTRONIC DEVICE M...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...

EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET L...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET PRODUCING APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

LASER SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METH...

EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM

EXTREME UV LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...

SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT G...

CHAMBER FOR EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND EXT...

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

Excimer laser apparatus

Pulse oscillating gas laser device