Takashi Shibayama

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vibration isolation device, arithmetic apparatus, exposure apparatu...
- Patent number 7,686,144
- Issue date Mar 30, 2010
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatu...
- Publication number 20100004869
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATU...
- Publication number 20080246201
- Publication date Oct 9, 2008
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Anti-vibration mount apparatus, exposure apparatus, and device manu...
- Publication number 20050211515
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Tomoyasu Hata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...