Takashi Shigeoka

Person

Nirasaki-Shi Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing unit, method of detecting end point of cleanin...
- Patent number 8,075,698
- Issue date Dec 13, 2011
- Tokyo Electron Limited
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas switching mechanism for plasma processing apparatus
- Patent number 7,717,061
- Issue date May 18, 2010
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal processing system
- Patent number 6,891,131
- Issue date May 10, 2005
- Tokyo Electron Limited
- Takeshi Sakuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating device, heat treatment apparatus having the heating device...
- Patent number 6,876,816
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring method, heat treating device and method, comp...
- Patent number 6,860,634
- Issue date Mar 1, 2005
- Tokyo Electron Limited
- Takashi Shigeoka
- G01 - MEASURING TESTING
Information Patent Grant
Lamp having a high-reflectance film for improving directivity of li...
- Patent number 6,825,615
- Issue date Nov 30, 2004
- Tokyo Electron Limited
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal process apparatus for a semiconductor substrate
- Patent number 6,641,302
- Issue date Nov 4, 2003
- Tokyo Electron Limited
- Yicheng Li
- G01 - MEASURING TESTING
Information Patent Grant
Thermal process apparatus for measuring accurate temperature by a r...
- Patent number 6,534,749
- Issue date Mar 18, 2003
- Tokyo Electron Limited
- Takashi Shigeoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation temperature measuring method and radiation temperature me...
- Patent number 6,488,407
- Issue date Dec 3, 2002
- Tokyo Electron Limited
- Masayuki Kitamura
- G01 - MEASURING TESTING
Information Patent Grant
Temperature measuring method, temperature control method and proces...
- Patent number 6,479,801
- Issue date Nov 12, 2002
- Tokyo Electron Limited
- Takashi Shigeoka
- G01 - MEASURING TESTING
Information Patent Grant
Virtual blackbody radiation system and radiation temperature measur...
- Patent number 6,467,952
- Issue date Oct 22, 2002
- Tokyo Electron Limited
- Eisuke Morisaki
- G01 - MEASURING TESTING
Information Patent Grant
Heat treatment apparatus having a thin light-transmitting window
- Patent number 6,437,290
- Issue date Aug 20, 2002
- Tokyo Electron Limited
- Shouqian Shao
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
A PROCESSING METHOD FOR PROCESSING A SUBSTRATE PLACED ON A PLACEMEN...
- Publication number 20090214758
- Publication date Aug 27, 2009
- TOKYO ELECTRON LIMITED
- Hiroshi KANNAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE THAT IS ADVANTAGEOUS IN MICROFABRICATION AND M...
- Publication number 20090124080
- Publication date May 14, 2009
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Thin Film, Thin Film Forming Apparatus, Program a...
- Publication number 20080241385
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Yasuhiro Oshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing method
- Publication number 20070160757
- Publication date Jul 12, 2007
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE THAT IS ADVANTAGEOUS IN MICROFABRICATION AND M...
- Publication number 20070138593
- Publication date Jun 21, 2007
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus and processing method
- Publication number 20060154383
- Publication date Jul 13, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device and its manufacturing method
- Publication number 20060091556
- Publication date May 4, 2006
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin-film formation in semiconductor device fabrication process and...
- Publication number 20060068104
- Publication date Mar 30, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus and processing method
- Publication number 20060027167
- Publication date Feb 9, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing unit, method of detecting end point of cleanin...
- Publication number 20050241761
- Publication date Nov 3, 2005
- TOKYO ELECTRON LIMITED
- Hiroshi Kannan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus
- Publication number 20040250765
- Publication date Dec 16, 2004
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heating device, heat treatment apparatus having the heating device...
- Publication number 20040112885
- Publication date Jun 17, 2004
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treatment device, substrate treatment method, and cleanin...
- Publication number 20040081757
- Publication date Apr 29, 2004
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus having a support member made of metal matrix c...
- Publication number 20040042152
- Publication date Mar 4, 2004
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing system
- Publication number 20040013419
- Publication date Jan 22, 2004
- Takeshi Sakuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VIRTUAL BLACKBODY RADIATION SYSTEM AND RADIATION TEMPERATURE MEASUR...
- Publication number 20020106000
- Publication date Aug 8, 2002
- Eisuke Morisaki
- G01 - MEASURING TESTING
Information Patent Application
Lamp having a high-reflectance film for improving directivity of li...
- Publication number 20020105275
- Publication date Aug 8, 2002
- Takashi Shigeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal process apparatus for measuring accurate temperature by a r...
- Publication number 20020040897
- Publication date Apr 11, 2002
- Takashi Shigeoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thermal process apparatus for a semiconductor substrate
- Publication number 20020041620
- Publication date Apr 11, 2002
- Yicheng Li
- G01 - MEASURING TESTING
Information Patent Application
Heat treatment apparatus having a thin light-transmitting window
- Publication number 20020030047
- Publication date Mar 14, 2002
- Shouqian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takashi Shigeoka

Person

Patents Grantslast 30 patents

Substrate processing unit, method of detecting end point of cleanin...

Gas switching mechanism for plasma processing apparatus

Thermal processing system

Heating device, heat treatment apparatus having the heating device...

Temperature measuring method, heat treating device and method, comp...

Lamp having a high-reflectance film for improving directivity of li...

Thermal process apparatus for a semiconductor substrate

Thermal process apparatus for measuring accurate temperature by a r...

Radiation temperature measuring method and radiation temperature me...

Temperature measuring method, temperature control method and proces...

Virtual blackbody radiation system and radiation temperature measur...

Heat treatment apparatus having a thin light-transmitting window

Patents Applicationslast 30 patents

A PROCESSING METHOD FOR PROCESSING A SUBSTRATE PLACED ON A PLACEMEN...

SEMICONDUCTOR DEVICE THAT IS ADVANTAGEOUS IN MICROFABRICATION AND M...

Method of Forming Thin Film, Thin Film Forming Apparatus, Program a...

Processing method

SEMICONDUCTOR DEVICE THAT IS ADVANTAGEOUS IN MICROFABRICATION AND M...

Processing apparatus and processing method

Semiconductor device and its manufacturing method

Thin-film formation in semiconductor device fabrication process and...

Processing apparatus and processing method

Substrate processing unit, method of detecting end point of cleanin...

Processing apparatus

Heating device, heat treatment apparatus having the heating device...

Substrate treatment device, substrate treatment method, and cleanin...

Processing apparatus having a support member made of metal matrix c...

Thermal processing system

VIRTUAL BLACKBODY RADIATION SYSTEM AND RADIATION TEMPERATURE MEASUR...

Lamp having a high-reflectance film for improving directivity of li...

Thermal process apparatus for measuring accurate temperature by a r...

Thermal process apparatus for a semiconductor substrate

Heat treatment apparatus having a thin light-transmitting window