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Takashi Shimahara
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Tokyo, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus and method
Patent number
6,524,650
Issue date
Feb 25, 2003
Kokusai Electric Co., Ltd.
Takashi Shimahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method
Patent number
6,139,642
Issue date
Oct 31, 2000
Kokusai Electric Co., Ltd.
Takashi Shimahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...