Takashi Shimahara

Person

  • Tokyo, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus and method

    • Patent number 6,524,650
    • Issue date Feb 25, 2003
    • Kokusai Electric Co., Ltd.
    • Takashi Shimahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and method

    • Patent number 6,139,642
    • Issue date Oct 31, 2000
    • Kokusai Electric Co., Ltd.
    • Takashi Shimahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...