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TAKASHI SONE

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  • Nirasaki-Shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR ETCHING LAYER TO BE ETCHED
    • Publication number 20160276582
    • Publication date Sep 22, 2016
    • TOKYO ELECTRON LIMITED
    • Mitsuru HASHIMOTO
    • G11 - INFORMATION STORAGE
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20150050750
    • Publication date Feb 19, 2015
    • TOKYO ELECTRON LIMITED
    • Takashi Sone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20140141532
    • Publication date May 22, 2014
    • TOKYO ELECTRON LIMITED
    • Eiichi Nishimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20140120635
    • Publication date May 1, 2014
    • TOKYO ELECTRON LIMITED
    • Eiichi Nishimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF ETCHING COPPER LAYER AND MASK
    • Publication number 20140110373
    • Publication date Apr 24, 2014
    • Eiichi Nishimura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DRY ETCHING METHOD FOR METAL FILM
    • Publication number 20130098868
    • Publication date Apr 25, 2013
    • TOKYO ELECTRON LIMITED
    • Eiichi NISHIMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
    • Publication number 20120244716
    • Publication date Sep 27, 2012
    • TOKYO ELECTRON LIMITED
    • Takashi Sone
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
    • Publication number 20120214315
    • Publication date Aug 23, 2012
    • TOKYO ELECTRON LIMITED
    • Eiichi Nishimura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FINE PATTERN FORMING METHOD
    • Publication number 20100170871
    • Publication date Jul 8, 2010
    • TOKYO ELECTRON LIMITED
    • TAKASHI SONE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20100048026
    • Publication date Feb 25, 2010
    • TOKYO ELECTRON LIMITED
    • Takashi Sone
    • H01 - BASIC ELECTRIC ELEMENTS