TREA

Takashi Souma

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  • Kiyose, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Electron beam exposure system
    • Patent number RE31630
    • Issue date Jul 17, 1984
    • Rikagaku Kenkyusho
    • Eiichi Goto
    • 250 - Radiant energy
  • Information Patent Grant

    Electron beam exposure method
    • Patent number 4,151,422
    • Issue date Apr 24, 1979
    • Rikagaku Kenkyusho
    • Eiichi Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Electron beam exposure system
    • Patent number 4,117,340
    • Issue date Sep 26, 1978
    • Kenkyusho; Rikagaku
    • Eiichi Goto
    • H01 - BASIC ELECTRIC ELEMENTS