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last 30 patents
Information
Patent Grant
Beam delivery system, focal length selecting method, and electronic...
Patent number
11,500,194
Issue date
Nov 15, 2022
Gigaphoton Inc.
Takashi Suganuma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser device, and extreme ultraviolet light generation system
Patent number
10,842,008
Issue date
Nov 17, 2020
Gigaphoton Inc.
Takashi Suganuma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
10,461,494
Issue date
Oct 29, 2019
Gigaphoton Inc.
Yoshiaki Kurosawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam dump apparatus, laser apparatus equipped with the beam dump ap...
Patent number
10,401,615
Issue date
Sep 3, 2019
Gigaphoton Inc.
Yoshiaki Kurosawa
G02 - OPTICS
Information
Patent Grant
Extreme ultraviolet light generating apparatus
Patent number
10,374,381
Issue date
Aug 6, 2019
Gigaphoton Inc.
Toru Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam delivery system and control method therefor
Patent number
10,194,515
Issue date
Jan 29, 2019
Gigaphoton Inc.
Yoshifumi Ueno
G02 - OPTICS
Information
Patent Grant
Laser unit and extreme ultraviolet light generating system
Patent number
9,954,339
Issue date
Apr 24, 2018
Gigaphoton Inc.
Takashi Suganuma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser amplifier, laser apparatus, and extreme ultraviolet light gen...
Patent number
9,685,756
Issue date
Jun 20, 2017
Gigaphoton Inc.
Takashi Suganuma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Slab amplifier, and laser apparatus and extreme ultraviolet light g...
Patent number
9,680,277
Issue date
Jun 13, 2017
Gigaphoton Inc.
Krzysztof Nowak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
9,667,019
Issue date
May 30, 2017
Gigaphoton Inc.
Masato Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser unit and extreme ultraviolet light generating system
Patent number
9,647,406
Issue date
May 9, 2017
Gigaphoton Inc.
Takashi Suganuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical device, laser apparatus, and extreme ultraviolet light gene...
Patent number
9,362,703
Issue date
Jun 7, 2016
Gigaphoton Inc.
Hakaru Mizoguchi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
9,184,551
Issue date
Nov 10, 2015
Gigaphoton Inc.
Takashi Suganuma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Regenerative amplifier, laser apparatus, and extreme ultraviolet li...
Patent number
9,153,927
Issue date
Oct 6, 2015
Gigaphoton Inc.
Krzysztof Nowak
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Slab amplification device, laser apparatus, and extreme ultraviolet...
Patent number
9,036,251
Issue date
May 19, 2015
Gigaphoton Inc.
Krzysztof Nowak
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Optical device, laser apparatus, and extreme ultraviolet light gene...
Patent number
8,891,161
Issue date
Nov 18, 2014
Gigaphoton Inc.
Hakaru Mizoguchi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser apparatus and extreme ultraviolet light source apparatus
Patent number
8,804,778
Issue date
Aug 12, 2014
Gigaphoton Inc.
Osamu Wakabayashi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
Patent number
8,804,902
Issue date
Aug 12, 2014
Gigaphoton Inc.
Hiroshi Someya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Regenerative amplifier, laser apparatus, and extreme ultraviolet li...
Patent number
8,749,876
Issue date
Jun 10, 2014
Gigaphoton Inc.
Krzysztof Nowak
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultra violet light source apparatus
Patent number
8,698,116
Issue date
Apr 15, 2014
Gigaphoton Inc.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Regenerative amplifier, laser apparatus, and extreme ultraviolet li...
Patent number
8,625,190
Issue date
Jan 7, 2014
Gigaphoton Inc.
Krysztof Nowak
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultra violet light source apparatus
Patent number
8,536,551
Issue date
Sep 17, 2013
Gigaphoton Inc.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultra violet light source apparatus
Patent number
8,481,984
Issue date
Jul 9, 2013
Gigaphoton Inc.
Masato Moriya
Information
Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
Patent number
8,477,412
Issue date
Jul 2, 2013
Gigaphoton Inc.
Hiroshi Someya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,450,706
Issue date
May 28, 2013
Gigaphoton Inc.
Tamotsu Abe
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,445,876
Issue date
May 21, 2013
Gigaphoton Inc.
Takashi Suganuma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,294,129
Issue date
Oct 23, 2012
Gigaphoton Inc.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light source apparatus
Patent number
8,173,984
Issue date
May 8, 2012
Komatsu Ltd.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultra violet light source apparatus
Patent number
7,923,705
Issue date
Apr 12, 2011
Gigaphoton Inc.
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Slab type laser apparatus
Patent number
7,903,715
Issue date
Mar 8, 2011
Gigaphoton Inc.
Krzysztof Nowak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20230387644
Publication date
Nov 30, 2023
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DELIVERY SYSTEM, FOCAL LENGTH SELECTING METHOD, AND ELECTRONIC...
Publication number
20210149185
Publication date
May 20, 2021
Gigaphoton Inc.
Takashi SUGANUMA
G02 - OPTICS
Information
Patent Application
LASER DEVICE, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20190157833
Publication date
May 23, 2019
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20180351322
Publication date
Dec 6, 2018
Gigaphoton Inc.
Yoshiaki KUROSAWA
G01 - MEASURING TESTING
Information
Patent Application
BEAM DUMP APPARATUS, LASER APPARATUS EQUIPPED WITH THE BEAM DUMP AP...
Publication number
20170299857
Publication date
Oct 19, 2017
Gigaphoton Inc.
Yoshiaki KUROSAWA
G02 - OPTICS
Information
Patent Application
BEAM DELIVERY SYSTEM AND CONTROL METHOD THEREFOR
Publication number
20170280544
Publication date
Sep 28, 2017
Gigaphoton Inc.
Yoshifumi UENO
G02 - OPTICS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Publication number
20170250517
Publication date
Aug 31, 2017
Gigaphoton Inc.
Toru SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20160285222
Publication date
Sep 29, 2016
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20160172814
Publication date
Jun 16, 2016
Gigaphoton Inc.
Takashi SUGANUMA
G02 - OPTICS
Information
Patent Application
LASER AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GEN...
Publication number
20160172820
Publication date
Jun 16, 2016
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20150351208
Publication date
Dec 3, 2015
Gigaphoton Inc.
Takashi SUGANUMA
G02 - OPTICS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20150340838
Publication date
Nov 26, 2015
Gigaphoton Inc.
Masato MORIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT G...
Publication number
20150188277
Publication date
Jul 2, 2015
GIGAPHOTON INC.
Krzysztof NOWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
Publication number
20140374605
Publication date
Dec 25, 2014
Hakaru MIZOGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERA...
Publication number
20140346375
Publication date
Nov 27, 2014
Krzysztof NOWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20140348188
Publication date
Nov 27, 2014
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LI...
Publication number
20130315272
Publication date
Nov 28, 2013
GIGAPHOTON INC.
Krzysztof NOWAK
B82 - NANO-TECHNOLOGY
Information
Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
Publication number
20130240762
Publication date
Sep 19, 2013
GIGAPHOTON INC.
Masato MORIYA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...
Publication number
20130221247
Publication date
Aug 29, 2013
GIGAPHOTON INC.
Hiroshi Someya
B82 - NANO-TECHNOLOGY
Information
Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
Publication number
20130208742
Publication date
Aug 15, 2013
GIGAPHOTON INC.
Hakaru Mizoguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLAB AMPLIFICATION DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET...
Publication number
20130034116
Publication date
Feb 7, 2013
Gigaphoton Inc.
Krzysztof Nowak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LI...
Publication number
20120229889
Publication date
Sep 13, 2012
Takashi Suganuma
B82 - NANO-TECHNOLOGY
Information
Patent Application
LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METH...
Publication number
20110309270
Publication date
Dec 22, 2011
Yohichi Yamanouchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20110180734
Publication date
Jul 28, 2011
GIGAPHOTON INC.
Masato MORIYA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20100193710
Publication date
Aug 5, 2010
Osamu Wakabayashi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Extreme ultra violet light source apparatus
Publication number
20100176310
Publication date
Jul 15, 2010
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultraviolet light source apparatus
Publication number
20100171049
Publication date
Jul 8, 2010
Masato Moriya
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20100140512
Publication date
Jun 10, 2010
Takashi SUGANUMA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SLAB TYPE LASER APPARATUS
Publication number
20090316746
Publication date
Dec 24, 2009
Krzysztof NOWAK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
Publication number
20090314967
Publication date
Dec 24, 2009
Masato MORIYA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR