Takashi TAIRA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 12,261,028
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Shuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring, substrate support, substrate processing apparatus and me...
- Patent number 11,984,301
- Issue date May 14, 2024
- Tokyo Electron Limited
- Takashi Taira
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric member, structure, and substrate processing apparatus
- Patent number 11,562,892
- Issue date Jan 24, 2023
- Tokyo Electron Limited
- Takashi Taira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate and method for detecting a prese...
- Patent number 11,264,267
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Takaharu Miyadate
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230326725
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Shuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC MEMBER, STRUCTURE, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210090864
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Takashi TAIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING, SUBSTRATE SUPPORT, SUBSTRATE PROCESSING APPARATUS AND ME...
- Publication number 20210035783
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Takashi TAIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD FOR DETECTING A PRESE...
- Publication number 20200303235
- Publication date Sep 24, 2020
- TOKYO ELECTRON LIMITED
- Takaharu MIYADATE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200098550
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Shuichi TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS