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Takashi TANIMURA
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Handa-City, JP
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last 30 patents
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Patent Application
EUV TRANSMISSIVE MEMBRANE, METHOD OF USE THEREOF, AND EXPOSURE METHOD
Publication number
20240094620
Publication date
Mar 21, 2024
NGK Insulators, Ltd.
Naoki GORIKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EUV TRANSMISSIVE FILM
Publication number
20230305192
Publication date
Sep 28, 2023
NGK Insulators, Ltd.
Toshikatsu KASHIWAYA
G02 - OPTICS
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Patent Application
EUV TRANSMISSIVE MEMBRANE
Publication number
20230213848
Publication date
Jul 6, 2023
NGK Insulators, Ltd.
Toshikatsu KASHIWAYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY