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Takashi Tanioka
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Gunma, JP
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last 30 patents
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Patent Grant
Processes and equipments for preparing F2-containing gases, as well...
Patent number
7,919,141
Issue date
Apr 5, 2011
Kanto Denka Kogyo Co., Ltd.
Takashi Tanioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
PROCESSES AND EQUIPMENTS FOR PREPARING F2-CONTAINING GASES, AS WELL...
Publication number
20100206480
Publication date
Aug 19, 2010
KANTO DENKA KOGYO CO., LTD.
Takashi Tanioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100186774
Publication date
Jul 29, 2010
Hironobu Miya
B08 - CLEANING
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Patent Application
Processes and equipments for preparing F2-containing gases, as well...
Publication number
20090047792
Publication date
Feb 19, 2009
Takashi Tanioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...