Takashi Tsukamoto

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Amagasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma etching apparatus
- Patent number 10,224,220
- Issue date Mar 5, 2019
- Tokyo Electron Limited
- Toshihisa Ozu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method
- Patent number 9,570,312
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Ryohei Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 9,034,698
- Issue date May 19, 2015
- Tokyo Electron Limited
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment device and plasma treatment method
- Patent number 8,771,537
- Issue date Jul 8, 2014
- Tokyo Electron Limited
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ETCHING METHOD
- Publication number 20150099366
- Publication date Apr 9, 2015
- TOKYO ELECTRON LIMITED
- Ryohei Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20150056773
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA ETCHING APPARATUS
- Publication number 20140262025
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT DEVICE AND PLASMA TREATMENT METHOD
- Publication number 20120190208
- Publication date Jul 26, 2012
- TOKYO ELECTRON LIMITED
- Toshihisa Ozu
- H01 - BASIC ELECTRIC ELEMENTS