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Takashi TSUKAMOTO
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Toyama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus
Patent number
12,087,598
Issue date
Sep 10, 2024
Kokusai Electric Corporation
Hideto Tateno
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Vaporizer and Substrate Processing Apparatus
Publication number
20190003047
Publication date
Jan 3, 2019
Kokusai Electric Corporation
Hideto TATENO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20180204742
Publication date
Jul 19, 2018
Hitachi Kokusai Electric Inc.
Hideto TATENO
H01 - BASIC ELECTRIC ELEMENTS