TREA

Takashi Tsuruta

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dry etching method
    • Patent number 7,179,752
    • Issue date Feb 20, 2007
    • Tokyo Electron Limited
    • Akitaka Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Dry etching method
    • Publication number 20040214445
    • Publication date Oct 28, 2004
    • Akitaka Shimizu
    • H01 - BASIC ELECTRIC ELEMENTS