Takashi Tsuzuki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for supplying slurry to polishing apparatus
- Patent number 6,802,762
- Issue date Oct 12, 2004
- Ebara Corporation
- Takashi Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive liquid feed apparatus, method for feeding additive to abra...
- Patent number 6,722,953
- Issue date Apr 20, 2004
- Ebara Corporation
- Takashi Tanaka
- B24 - GRINDING POLISHING
Information Patent Grant
Micro-processing apparatus and method therefor
- Patent number 5,852,298
- Issue date Dec 22, 1998
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Polishing platen and polishing apparatus
- Publication number 20090247057
- Publication date Oct 1, 2009
- EBARA CORPORATION
- Takuji Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
Abrasive liquid feed apparatus, method for feeding additive to abra...
- Publication number 20020072310
- Publication date Jun 13, 2002
- Takashi Tanaka
- B24 - GRINDING POLISHING
Information Patent Application
Method for supplying slurry to polishing apparatus
- Publication number 20020045412
- Publication date Apr 18, 2002
- Takashi Tanaka
- B24 - GRINDING POLISHING