Takashi Uno

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,255,063
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Hayato Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,191,166
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Takashi Uno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,742,232
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Yoshinori Ikeda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and liquid mixing method
- Patent number 10,067,514
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate liquid treatment apparatus, method of cleaning substrate...
- Patent number 10,037,901
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Kazuya Koyama
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,778,092
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250191905
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Hayato TANOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSINGSYSTEM
- Publication number 20250125162
- Publication date Apr 17, 2025
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING METHOD AND BONDING SYSTEM
- Publication number 20250029950
- Publication date Jan 23, 2025
- TOKYO ELECTRON LIMITED
- Yuji MIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240355647
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPUT...
- Publication number 20240290607
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...
- Publication number 20240282603
- Publication date Aug 22, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi MARUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230352328
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220130689
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313209
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210296119
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Hayato TANOUE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...
- Publication number 20150328668
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Kazuya KOYAMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
- Publication number 20150146498
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20140373877
- Publication date Dec 25, 2014
- Shigehisa Inoue
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140283887
- Publication date Sep 25, 2014
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110220153
- Publication date Sep 15, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Takashi Uno

Person

Patents Grantslast 30 patents

Substrate processing system and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and liquid mixing method

Substrate liquid treatment apparatus, method of cleaning substrate...

Substrate processing apparatus, substrate processing method and sto...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSINGSYSTEM

BONDING METHOD AND BONDING SYSTEM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPUT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF ESTIMATING FLOW RATE O...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...