Takashi Yabuta

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,748,790
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 10,236,192
- Issue date Mar 19, 2019
- Tokyo Electron Limited
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus
- Patent number 9,192,878
- Issue date Nov 24, 2015
- Tokyo Electron Limited
- Shogo Mizota
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 8,475,668
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus, cleaning method and recording medium
- Patent number 8,308,870
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
- Patent number 8,303,723
- Issue date Nov 6, 2012
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus and compute...
- Patent number 8,113,221
- Issue date Feb 14, 2012
- Tokyo Electron Limited
- Hiromitsu Nanba
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus and compute...
- Patent number 7,927,429
- Issue date Apr 19, 2011
- Tokyo Electron Limited
- Hiromitsu Nanba
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 6,513,537
- Issue date Feb 4, 2003
- Tokyo Electron Limited
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220037167
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Takashi YABUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180254199
- Publication date Sep 6, 2018
- TOKYO ELECTRON LIMITED
- Hiroyuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20150147888
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20140377463
- Publication date Dec 25, 2014
- Yosuke Hachiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
LIQUID PROCESSING APPARATUS
- Publication number 20140182455
- Publication date Jul 3, 2014
- TOKYO ELECTRON LIMITED
- Shogo Mizota
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND COMPUTE...
- Publication number 20110155193
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Hiromitsu NANBA
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20110089137
- Publication date Apr 21, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...
- Publication number 20100319734
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, CLEANING METHOD AND RECORDING MEDIUM
- Publication number 20100108103
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing method and apparatus
- Publication number 20100108096
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cleaning method, substrate cleaning apparatus and compute...
- Publication number 20070131256
- Publication date Jun 14, 2007
- Hiromitsu Nanba
- B08 - CLEANING

Takashi Yabuta

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Liquid processing apparatus, liquid processing method, and storage...

Liquid processing apparatus

Substrate liquid processing apparatus, substrate liquid processing...

Cleaning apparatus, cleaning method and recording medium

Liquid processing apparatus, liquid processing method, and storage...

Substrate cleaning method, substrate cleaning apparatus and compute...

Substrate cleaning method, substrate cleaning apparatus and compute...

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...

LIQUID PROCESSING APPARATUS

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS AND COMPUTE...

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE...

CLEANING APPARATUS, CLEANING METHOD AND RECORDING MEDIUM

Liquid processing method and apparatus

Substrate cleaning method, substrate cleaning apparatus and compute...