Takashi YAMAMOTO

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Slip ring, support mechanism, and plasma processing apparatus
- Patent number 10,665,434
- Issue date May 26, 2020
- Tokyo Electron Limited
- Kazuya Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maintenance method of plasma processing apparatus
- Patent number 10,541,142
- Issue date Jan 21, 2020
- Tokyo Electron Limited
- Kazuya Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower electrode and plasma processing apparatus
- Patent number 10,269,543
- Issue date Apr 23, 2019
- Tokyo Electron Limited
- Takashi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Test apparatus and plasma processing apparatus
- Patent number 9,673,027
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Takashi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode assembly and plasma processing apparatus
- Patent number 9,520,276
- Issue date Dec 13, 2016
- Tokyo Electron Limited
- Chikako Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,142,391
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Takashi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
- Patent number 9,021,984
- Issue date May 5, 2015
- Tokyo Electron Limited
- Takashi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 9,011,637
- Issue date Apr 21, 2015
- Tokyo Electron Limited
- Takashi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and manufacturing method thereof
- Patent number 8,776,356
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Tsuyoshi Hida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck and manufacturing method thereof
- Patent number 8,517,392
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Tsuyoshi Hida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190131158
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kazuya MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAINTENANCE METHOD OF PLASMA PROCESSING APPARATUS
- Publication number 20190131137
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Kazuya MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLIP RING, SUPPORT MECHANISM, AND PLASMA PROCESSING APPARATUS
- Publication number 20180047547
- Publication date Feb 15, 2018
- TOKYO ELECTRON LIMITED
- Kazuya MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOWER ELECTRODE AND PLASMA PROCESSING APPARATUS
- Publication number 20150206722
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Takashi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20150200124
- Publication date Jul 16, 2015
- TOKYO ELECTRON LIMITED
- Takashi YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD ASSEMBLY, PLASMA PROCESSING APPARATUS AND METHOD FOR MA...
- Publication number 20150129112
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Michishige SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20140203821
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Takashi YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF
- Publication number 20130306593
- Publication date Nov 21, 2013
- TOKYO ELECTRON LIMITED
- Tsuyoshi HIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE ASSEMBLY AND PLASMA PROCESSING APPARATUS
- Publication number 20120247678
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Chikako TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20110287631
- Publication date Nov 24, 2011
- TOKYO ELECTRON LIMITED
- Takashi YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20110240221
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Takashi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF
- Publication number 20090243236
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Tsuyoshi HIDA
- H01 - BASIC ELECTRIC ELEMENTS

Takashi YAMAMOTO

Person

Patents Grantslast 30 patents

Slip ring, support mechanism, and plasma processing apparatus

Maintenance method of plasma processing apparatus

Lower electrode and plasma processing apparatus

Test apparatus and plasma processing apparatus

Electrode assembly and plasma processing apparatus

Method of manufacturing semiconductor device

Plasma processing apparatus and semiconductor device manufacturing...

Plasma processing apparatus and method of manufacturing semiconduct...

Electrostatic chuck and manufacturing method thereof

Electrostatic chuck and manufacturing method thereof

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

MAINTENANCE METHOD OF PLASMA PROCESSING APPARATUS

SLIP RING, SUPPORT MECHANISM, AND PLASMA PROCESSING APPARATUS

LOWER ELECTRODE AND PLASMA PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SHOWER HEAD ASSEMBLY, PLASMA PROCESSING APPARATUS AND METHOD FOR MA...

TEST APPARATUS AND PLASMA PROCESSING APPARATUS

ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF

ELECTRODE ASSEMBLY AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...

ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREOF