Takashi YAMAUCHI

Person

Koshi City, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for forming mask pattern, storage medium, and apparatus for...
- Patent number 12,002,676
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Takashi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,860,542
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method, substrate processing apparatus, and co...
- Patent number 11,604,415
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Takashi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid treatment apparatus and method of adjusting temperature of t...
- Patent number 11,561,473
- Issue date Jan 24, 2023
- Tokyo Electron Limited
- Takashi Yamauchi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for forming mask pattern, storage medium, and apparatus for...
- Patent number 11,508,580
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Takashi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,036,140
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 9,810,987
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate processing method, storage medium and substrate processin...
- Patent number 9,748,100
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Tomonori Esaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
- Publication number 20240274438
- Publication date Aug 15, 2024
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, STORAGE MEDIUM, AND SUBSTRATE TREATMENT...
- Publication number 20230305389
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...
- Publication number 20230152703
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
- Publication number 20230042982
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...
- Publication number 20210208504
- Publication date Jul 8, 2021
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...
- Publication number 20210181638
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Takashi YAMAUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHODF FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...
- Publication number 20200279736
- Publication date Sep 3, 2020
- Takashi YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20200233308
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM AND SUBSTRATE PROCESSIN...
- Publication number 20160163560
- Publication date Jun 9, 2016
- TOKYO ELECTRON LIMITED
- Tomonori ESAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20160124307
- Publication date May 5, 2016
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takashi YAMAUCHI

Person

Patents Grantslast 30 patents

Method for forming mask pattern, storage medium, and apparatus for...

Liquid treatment apparatus and method of adjusting temperature of t...

Substrate processing method, substrate processing apparatus, and co...

Liquid treatment apparatus and method of adjusting temperature of t...

Method for forming mask pattern, storage medium, and apparatus for...

Substrate processing apparatus, substrate processing method and rec...

Substrate treatment method, computer storage medium and substrate t...

Substrate processing method, storage medium and substrate processin...

Patents Applicationslast 30 patents

METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...

SUBSTRATE TREATMENT METHOD, STORAGE MEDIUM, AND SUBSTRATE TREATMENT...

LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...

METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND CO...

LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF T...

METHODF FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM AND SUBSTRATE PROCESSIN...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...