Takashi YOKOGAWA

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming metal-containing film
- Patent number 9,650,715
- Issue date May 16, 2017
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,472,398
- Issue date Oct 18, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,466,477
- Issue date Oct 11, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 9,416,446
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 9,340,873
- Issue date May 17, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, cleaning method, and...
- Patent number 9,238,257
- Issue date Jan 19, 2016
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming metal-containing film
- Patent number 9,045,825
- Issue date Jun 2, 2015
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,808,455
- Issue date Aug 19, 2014
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,691,708
- Issue date Apr 8, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment device
- Patent number 8,652,258
- Issue date Feb 18, 2014
- Hitachi Kokusai Electric Inc.
- Takashi Yokogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device producing method with selective epitaxial growth
- Patent number 8,466,049
- Issue date Jun 18, 2013
- Hitachi Kokusai Electric Inc.
- Yasuhiro Inokuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device and substrate processi...
- Patent number 8,123,858
- Issue date Feb 28, 2012
- Hitachi Kokusai Electric Inc.
- Jie Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011931
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Shun MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20160024649
- Publication date Jan 28, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20150262816
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric, Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING METAL-CONTAINING FILM
- Publication number 20150225852
- Publication date Aug 13, 2015
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device Manufacturing Method and Substrate Processing...
- Publication number 20150214045
- Publication date Jul 30, 2015
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20140162454
- Publication date Jun 12, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20140080317
- Publication date Mar 20, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20130095668
- Publication date Apr 18, 2013
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20120214300
- Publication date Aug 23, 2012
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20120108077
- Publication date May 3, 2012
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND...
- Publication number 20110290182
- Publication date Dec 1, 2011
- Masanori SAKAI
- B08 - CLEANING
Information Patent Application
Substrate treatment device
- Publication number 20110212623
- Publication date Sep 1, 2011
- Hitachi Kokusai Electric Inc.
- Takashi Yokogawa
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110186984
- Publication date Aug 4, 2011
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20110183519
- Publication date Jul 28, 2011
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND...
- Publication number 20110059600
- Publication date Mar 10, 2011
- Hitachi Kokusai Electric Inc.
- Masanori SAKAI
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20110031593
- Publication date Feb 10, 2011
- Hitachi Kokusai Electric, Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device producing method
- Publication number 20090104740
- Publication date Apr 23, 2009
- Hitachi Kokusai Electric Inc.
- Yasuhiro Inokuchi
- C30 - CRYSTAL GROWTH
Information Patent Application
Method For Site-Specifically Introducing Non-Natural Amino Acid Int...
- Publication number 20090023139
- Publication date Jan 22, 2009
- Kazuya Nishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Substrate treatment device
- Publication number 20080135516
- Publication date Jun 12, 2008
- Hitachi Kokusai Electric Inc.
- Takashi Yokogawa
- C30 - CRYSTAL GROWTH
Information Patent Application
Manufacturing method of semiconductor device and substrate processi...
- Publication number 20080090389
- Publication date Apr 17, 2008
- Hitachi Kokusai Electric Inc.
- Jie Wang
- C30 - CRYSTAL GROWTH

Takashi YOKOGAWA

Person

Patents Grantslast 30 patents

Method of forming metal-containing film

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device manufacturing method and substrate processing...

Semiconductor device manufacturing method and substrate processing...

Method of manufacturing semiconductor device, cleaning method, and...

Method of forming metal-containing film

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device and substrate processi...

Substrate treatment device

Semiconductor device producing method with selective epitaxial growth

Manufacturing method of semiconductor device and substrate processi...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF FORMING METAL-CONTAINING FILM

Semiconductor Device Manufacturing Method and Substrate Processing...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

MEHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND...

Substrate treatment device

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, CLEANING METHOD, AND...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Semiconductor device producing method

Method For Site-Specifically Introducing Non-Natural Amino Acid Int...

Substrate treatment device

Manufacturing method of semiconductor device and substrate processi...