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Takashi Yokota
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Kanagawa-Ken, JP
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Patents Grants
last 30 patents
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Patent Grant
Heat treatment method and heat treatment device
Patent number
6,975,917
Issue date
Dec 13, 2005
Tokyo Electron Limited
Koichi Sakamoto
F27 - FURNACES KILNS OVENS RETORTS
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Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
Patent number
6,922,522
Issue date
Jul 26, 2005
Tokyo Electron Limited
Wenling Wang
G01 - MEASURING TESTING
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Patent Grant
Heat treatment apparatus, calibration method for temperature measur...
Patent number
6,622,104
Issue date
Sep 16, 2003
Tokyo Electron Limited
Wenling Wang
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Heat treatment method and heat treatment device
Publication number
20040238519
Publication date
Dec 2, 2004
Koichi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Heat treatment apparatus, calibration method for temperature measur...
Publication number
20040005147
Publication date
Jan 8, 2004
Wenling Wang
G01 - MEASURING TESTING
Information
Patent Application
Heat treatment apparatus, calibration method for temperature measur...
Publication number
20020069025
Publication date
Jun 6, 2002
Wenling Wang
G01 - MEASURING TESTING