Takatoshi Chiba

Person

Muko, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of producing recrystallized-material-member, and apparatus a...
- Patent number 6,235,110
- Issue date May 22, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Hideo Naomoto
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of producing recrystallized-material-member, and apparatus a...
- Patent number 5,932,003
- Issue date Aug 3, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Hideo Naomoto
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate heat treatment apparatus
- Patent number 5,611,685
- Issue date Mar 18, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for measuring the temperature of a substrate
- Patent number 5,539,855
- Issue date Jul 23, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for heat processing a substrate
- Patent number 5,405,446
- Issue date Apr 11, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for heat-treating wafer by light-irradiation and device f...
- Patent number 5,315,092
- Issue date May 24, 1994
- Dainippon Screen Mfg. Co., Ltd.
- Mitsukazu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling heat treatment apparatus for substrate
- Patent number 4,924,073
- Issue date May 8, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Takatoshi Chiba
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for controlling the temperature of a radiantly...
- Patent number 4,761,538
- Issue date Aug 2, 1988
- Dainippon Screen Mfg. Co., Ltd.
- Takatoshi Chiba
- G05 - CONTROLLING REGULATING

Takatoshi Chiba

Person

Patents Grantslast 30 patents

Method of producing recrystallized-material-member, and apparatus a...

Method of producing recrystallized-material-member, and apparatus a...

Substrate heat treatment apparatus

Apparatus for measuring the temperature of a substrate

Apparatus for heat processing a substrate

Apparatus for heat-treating wafer by light-irradiation and device f...

Method of controlling heat treatment apparatus for substrate

Method and apparatus for controlling the temperature of a radiantly...