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Takatoshi Nagoya
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Patents Grants
last 30 patents
Information
Patent Grant
Method for evaluating oxide dielectric breakdown voltage of a silic...
Patent number
8,551,246
Issue date
Oct 8, 2013
Shin-Etsu Handotai Co., Ltd.
Fumio Tahara
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for producing annealed wafer and annealed wafer
Patent number
7,659,216
Issue date
Feb 9, 2010
Shin-Etsu Handotai Co., Ltd.
Takatoshi Nagoya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for evaluating dopant contamination of semiconductor wafer
Patent number
7,622,312
Issue date
Nov 24, 2009
Shin-Etsu Handotai Co., Ltd.
Takatoshi Nagoya
G01 - MEASURING TESTING
Information
Patent Grant
Method of producing annealed wafer and annealed wafer
Patent number
7,189,293
Issue date
Mar 13, 2007
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing annealed wafer and annealed wafer
Patent number
7,153,785
Issue date
Dec 26, 2006
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Annealed wafer manufacturing method and annealed wafer
Patent number
6,841,450
Issue date
Jan 11, 2005
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing single-crystal-silicon wafers
Patent number
6,805,743
Issue date
Oct 19, 2004
Shin-Etsu Handotai Co., Ltd.
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Production method for annealed wafer
Patent number
6,670,261
Issue date
Dec 30, 2003
Shin-Etsu Handotai Co., Ltd.
Shoji Akiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a single crystal thin film
Patent number
5,685,905
Issue date
Nov 11, 1997
Shin-Etsu Handotai, Co., Ltd.
Takatoshi Nagoya
C30 - CRYSTAL GROWTH
Information
Patent Grant
Apparatus for growing silicon epitaxial layer
Patent number
5,487,358
Issue date
Jan 30, 1996
Shin-Etsu Handotai Co., Ltd.
Yutaka Ohta
C30 - CRYSTAL GROWTH
Information
Patent Grant
Process for growing silicon epitaxial layer
Patent number
5,421,288
Issue date
Jun 6, 1995
Shin-Etsu Handotai Co., Ltd.
Yutaka Ohta
C30 - CRYSTAL GROWTH
Information
Patent Grant
Pattern shift measuring method
Patent number
5,172,188
Issue date
Dec 15, 1992
Shin-Etsu Handotai Co., Ltd.
Takatoshi Nagoya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern shift measuring method
Patent number
5,156,982
Issue date
Oct 20, 1992
Shin-Etsu Handotai Co., Ltd.
Takatoshi Nagoya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON S...
Publication number
20110045246
Publication date
Feb 24, 2011
Shin-Etsu Handotai Co., Ltd.
Fumio Tahara
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for producing annealed wafer and annealed wafer
Publication number
20090011613
Publication date
Jan 8, 2009
Takatoshi Nagoya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method For Evaluating Dopant Contamination Of Semiconductor Wafer
Publication number
20080108155
Publication date
May 8, 2008
SHIN-ETSU HANDOTAI CO., LTD.
Takatoshi Nagoya
G01 - MEASURING TESTING
Information
Patent Application
Production method for anneal wafer and anneal wafer
Publication number
20040231759
Publication date
Nov 25, 2004
Norihiro Kobayashi
C30 - CRYSTAL GROWTH
Information
Patent Application
Production method for anneal wafer and anneal wafer
Publication number
20040192071
Publication date
Sep 30, 2004
Norihiro Kobayashi
C30 - CRYSTAL GROWTH
Information
Patent Application
Method for manufacturing single-crystal-silicon wafers
Publication number
20030164139
Publication date
Sep 4, 2003
Norihiro Kobayashi
C30 - CRYSTAL GROWTH
Information
Patent Application
Method of producing anneal wafer and anneal wafer
Publication number
20020173173
Publication date
Nov 21, 2002
Norihiro Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Production method for annealed wafer
Publication number
20020160591
Publication date
Oct 31, 2002
Shoji Akiyama
H01 - BASIC ELECTRIC ELEMENTS